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Bench RCA Cleaning

BC200-A06 is a multi-functional equipment for 6" and 8" wafers, covering RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning and wafer regeneration. Its excellent process indicators include very low fragmentation rate (≤1/100,000), high reliability (UPTIME ≥95%), and excellent particle control (Particle≤20@0.16um). Optional high-end accessories such as cassette exchanger and CDS concentration meter, as well as good temperature, concentration, pressure and flow control functions, make the BC200-A06 maintain excellent performance in various complex processes.

Product Description

Model	BC200-A06
Size Wafer	6 "/8"
process application	wafer RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning, wafer regeneration
Process indicators	Breakage rate	≤ 1/100000
	UPTIME	≥95%
	Particle	≤ 20@0.16um
software control	PC PLC configuration, support GEM/SECS,EAP,FDC and other functions
Configuration	6 process tanks (4-14 tanks can be customized)
	Advanced IPA Drying Unit
	Multiple transfer arms and isolation Shuttles improve efficiency and prevent cross-contamination
	Cassette exchange mechanism(option)
	CDS, concentration meter(option)
	Good control function on temperature, concentration, pressure and liquid flow
	Perfect safety protection mechanism, including anti-collision, water leakage and automatic fire protection system

Guangdong KDW Intelligent Equipment Co.,Ltd.

粤ICP备2024271198号-1

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Address: 3rd Floor, Building A1, No. 38 Jingfu East Road, Yangwu Village, Dalang Town, Dongguan City

Tel: +86-0769-81789005

E-mail: sales@kdwtech.cn

Guangdong KDW Intelligent Equipment Co.,Ltd.

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