BL300-A06 is a multi-functional machine designed for 12-inch wafers, suitable for RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning and wafer regeneration and other processes. The equipment adopts advanced PC+PLC configuration and supports a variety of industry standard protocols such as E84, GEM/SECS, EAP, FDC, etc., to ensure a high degree of automation and intelligence in operation. BL300-A06 is equipped with 6 customizable process tanks, which can be flexibly adjusted according to customer needs, and has a complete safety protection mechanism, including anti-collision, water leakage and automatic fire protection system, which provides a solid guarantee for the safe operation of the equipment.
BC200-A06 is a multi-functional equipment for 6" and 8" wafers, covering RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning and wafer regeneration. Its excellent process indicators include very low fragmentation rate (≤1/100,000), high reliability (UPTIME ≥95%), and excellent particle control (Particle≤20@0.16um). Optional high-end accessories such as cassette exchanger and CDS concentration meter, as well as good temperature, concentration, pressure and flow control functions, make the BC200-A06 maintain excellent performance in various complex processes.
Guangdong KDW Intelligent Equipment Co.,Ltd.
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