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Bench Cleaning

BL300-A06 is a multi-functional machine designed for 12-inch wafers, suitable for RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning and wafer regeneration and other processes. The equipment adopts advanced PC+PLC configuration and supports a variety of industry standard protocols such as E84, GEM/SECS, EAP, FDC, etc., to ensure a high degree of automation and intelligence in operation. BL300-A06 is equipped with 6 customizable process tanks, which can be flexibly adjusted according to customer needs, and has a complete safety protection mechanism, including anti-collision, water leakage and automatic fire protection system, which provides a solid guarantee for the safe operation of the equipment.

Product Description

Model	BL300-A06
Size Wafer	12"
process application	Wafer RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning, wafer regeneration, etc.
Process indicators	Breakage rate	≤ 1/100000
	UPTIME	≥95%
	Particle	≤ 20@0.09um
software control	PC PLC configuration, support E84,GEM/SECS,EAP,FDC and other functions
Configuration	6 process tanks (4-14 tanks can be customized)
	Advanced IPA Drying Unit
	Reliable EFEM system with 2-4 FOUP Load ports
	Multiple transfer arms and isolation Shuttles improve efficiency and prevent cross-contamination
	CDS, concentration meter(option)
	Good control function on temperature, concentration, pressure and liquid flow
	Perfect safety protection mechanism, including anti-collision, water leakage and automatic fire protection system

Guangdong KDW Intelligent Equipment Co.,Ltd.

粤ICP备2024271198号-1

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Address: 3rd Floor, Building A1, No. 38 Jingfu East Road, Yangwu Village, Dalang Town, Dongguan City

Tel: +86-0769-81789005

E-mail: sales@kdwtech.cn

Guangdong KDW Intelligent Equipment Co.,Ltd.

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