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Bench Cleaning

BL300-A08 is a multifunctional device designed for 8&12 inch wafers, suitable for RCA cleaning PR STRIP、 Various processes such as dielectric film etching, metal etching, organic cleaning, and wafer regeneration. This device adopts advanced PC+PLC configuration and supports multiple industry standard protocols such as E84, GEM/SECS, EAP, FDC, etc., ensuring high automation and intelligence of operations. BL300-A08 is equipped with 8 customizable process tanks that can be flexibly adjusted according to customer needs. It also has a comprehensive safety protection mechanism, including collision prevention, water leakage, and automatic fire protection system, providing a solid guarantee for the safe operation of the equipment.

Product Description

Model	BL300-A08
Size Wafer	12"
process application	Wafer RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning, wafer regeneration, etc.
Process indicators	Breakage rate	≤ 1/100000
	UPTIME	≥95%
	Particle	≤ 20@0.09um
software control	PC PLC configuration, support E84,GEM/SECS,EAP,FDC and other functions
Configuration	6 process tanks (4-14 tanks can be customized)
	Advanced IPA Drying Unit
	Reliable EFEM system with 2-4 FOUP Load ports
	Multiple transfer arms and isolation Shuttles improve efficiency and prevent cross-contamination
	CDS, concentration meter(option)
	Good control function on temperature, concentration, pressure and liquid flow
	Perfect safety protection mechanism, including anti-collision, water leakage and automatic fire protection system

Guangdong KDW Intelligent Equipment Co.,Ltd.

粤ICP备2024271198号-1

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Address: 3rd Floor, Building A1, No. 38 Jingfu East Road, Yangwu Village, Dalang Town, Dongguan City

Tel: +86-0769-81789005

E-mail: sales@kdwtech.cn

Guangdong KDW Intelligent Equipment Co.,Ltd.

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