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Process TechnologySemiconductor Wafer Fabrication ProcessCleaning Process in FABWet EtchingPhotoresist Stripping and Cleaning
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Single Wafer Backside EtcherBench CleaningSingle PR RemoveSingle Wafer Etcher
The SC300-F08 is a high-efficiency single etching and cleaning machine designed for 12-inch wafers. The equipment adopts advanced PC+PLC configuration and supports a variety of industry-standard protocols such as GEM/SECS, EAP, E84, etc., ensuring a highly automated and intelligent operation experience. In addition, the equipment also has a powerful chemical recovery system, with a recovery rate of more than 95%, which effectively reduces production costs. The SC300-F08 exhibits excellent performance and is ideal for single wafer etcher.
Address: 101 & 201, East Unit; 102 & 202, West Unit, Building 8, Phase I, Block V, Hengtai IMP, Suzhou Nano City, No. 75 Pudian Road, Suzhou Industrial Park
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