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Single Wafer Etcher

The SC300-F08 is a high-efficiency single etching and cleaning machine designed for 12-inch wafers. The equipment adopts advanced PC+PLC configuration and supports a variety of industry-standard protocols such as GEM/SECS, EAP, E84, etc., ensuring a highly automated and intelligent operation experience. In addition, the equipment also has a powerful chemical recovery system, with a recovery rate of more than 95%, which effectively reduces production costs. The SC300-F08 exhibits excellent performance and is ideal for single wafer etcher.

Product Description

Model	SC300-F08
Size Wafer	12"
process application	Wafer single etching and cleaning
Process indicator	Breakage rate	≤ 1/20000
	UPTIME	≥95%
	Particle	≤ 20@0.06um
software control	PC PLC configuration, support E84,GEM/SECS,EAP,FDC and other functions
Configuration	8 process chambers (2-8 chambers can be customized)
	Reliable EFEM system with two-four FOUP Load ports
	2-6 chemicals application can be configured
	Reliable chemical reclaim system design, reclaim rate > 95%
	DIO3 system(Option)
	Local CDS, concentration meter(Option)
	Good control function on temperature, concentration, pressure and liquid flow

Guangdong KDW Intelligent Equipment Co.,Ltd.

粤ICP备2024271198号-1

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Address: 3rd Floor, Building A1, No. 38 Jingfu East Road, Yangwu Village, Dalang Town, Dongguan City

Tel: +86-0769-81789005

E-mail: sales@kdwtech.cn

Guangdong KDW Intelligent Equipment Co.,Ltd.

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