BL300-A08 is a multifunctional device designed for 8&12 inch wafers, suitable for RCA cleaning PR STRIP、 Various processes such as dielectric film etching, metal etching, organic cleaning, and wafer regeneration. This device adopts advanced PC+PLC configuration and supports multiple industry standard protocols such as E84, GEM/SECS, EAP, FDC, etc., ensuring high automation and intelligence of operations. BL300-A08 is equipped with 8 customizable process tanks that can be flexibly adjusted according to customer needs. It also has a comprehensive safety protection mechanism, including collision prevention, water leakage, and automatic fire protection system, providing a solid guarantee for the safe operation of the equipment.
BC200-A06 is a multi-functional equipment for 6" and 8" wafers, covering RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning and wafer regeneration. Its excellent process indicators include very low fragmentation rate (≤1/100,000), high reliability (UPTIME ≥95%), and excellent particle control (Particle≤20@0.16um). Optional high-end accessories such as cassette exchanger and CDS concentration meter, as well as good temperature, concentration, pressure and flow control functions, make the BC200-A06 maintain excellent performance in various complex processes.
BC200-A06 is a multi-functional equipment for 6" and 8" wafers, covering RCA cleaning, PR STRIP, dielectric film etching, metal etching, organic cleaning and wafer regeneration. Its excellent process indicators include very low fragmentation rate (≤1/100,000), high reliability (UPTIME ≥95%), and excellent particle control (Particle≤20@0.16um). Optional high-end accessories such as cassette exchanger and CDS concentration meter, as well as good temperature, concentration, pressure and flow control functions, make the BC200-A06 maintain excellent performance in various complex processes.
Guangdong KDW Intelligent Equipment Co.,Ltd.
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